|
Plane servo motor by air bearings and integrated position sensors can be placed in multiple satellites on a single stator mover moves in the XY plane. Can also be hung upside down operations.
 X-Y stage
 Integrated position sensors can be used for closed-loop control
Using air bearings so no no wear
Magnetic field does not leak, does not affect the surrounding equipment
No temperature problems, the system accuracy is relatively stable
Can be installed upside down
Stator size (stroke) customized according to customer demand
|
Linear Motor (C)
